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Maintenance of a Metal Etcher in a Semiconductor Factory Student:Chih-Liang In previous work, sulfur hexafluoride (SF6) tracer gas of 1000 ppm was

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SWITCHGEAR AND SF6 GAS 31 January, 2002 INDEX 1 Why use SF6? Relevant characteristics for its application in switchgear Basic design requirement

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Fundamental Study on the Maintenance Technology for SF6 Gas Condition using Pressure and UHF Sensorsdoi:10.5207/JIEIE.2007.21.2.020

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